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BS IEC 62047-30:2017

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BS IEC 62047-30:2017

Semiconductor devices. Micro-electromechanical devices - Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 93578 7
ICS 31.080.99 : Other semiconductor devices
31.140 : Piezoelectric devices
Number of pages 24
Cross references IEC 62047-30:2017
Year 2017
Country United Kingdom