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ISO 25178-607:2019
Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
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This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Author | ISO/TC 213 Dimensional and geometrical product specifications and verification |
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Editor | ISO |
Document type | Standard |
Format | Paper |
Edition | 1 |
ICS | 17.040.20 : Properties of surfaces
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Number of pages | 21 |
Weight(kg.) | 0.1357 |
Year | 2019 |
Country | Switzerland |